TY - BOOK TI - Modeling MEMS and NEMS SN - 1584883065 (alk. paper PY - 2003/// CY - Boca Raton, FL PB - Chapman & Hall/CRC UR - http://www.columbia.edu/cgi-bin/cul/resolve?clio7938206.003 | http://www.columbia.edu/cgi-bin/cul/resolve?clio7938206.004 ER -